There is provided a matching method, capable of positioning with higher accuracy at higher speed. The method includes the steps of: constructing a pattern model of a registered image in which a plurality of reference points are set on an extracted contour and a corresponding point search line having a predetermined length and passing through each reference point; acquiring an image and acquiring an initial position corresponding to the registered image to arrange the corresponding point search line of the pattern model; finding a corresponding point on the image corresponding to each reference point with regard to each corresponding point search line at a position along the corresponding point search line on the image; and regarding a relation between each reference point and the corresponding point as an evaluation value and performing fine positioning such that an accumulated value of the evaluation values becomes minimal or maximal.