Invention Grant
US08407629B2 Pattern verification-test method, optical image intensity distribution acquisition method, and computer program
有权
模式验证测试方法,光学图像强度分布采集方法和计算机程序
- Patent Title: Pattern verification-test method, optical image intensity distribution acquisition method, and computer program
- Patent Title (中): 模式验证测试方法,光学图像强度分布采集方法和计算机程序
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Application No.: US13491639Application Date: 2012-06-08
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Publication No.: US08407629B2Publication Date: 2013-03-26
- Inventor: Masamitsu Itoh , Satoshi Tanaka
- Applicant: Masamitsu Itoh , Satoshi Tanaka
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2008-162508 20080620
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A pattern verification-test method according to an embodiment of the present invention includes: deriving an illumination condition at a verification-test subject position in a photomask surface of a mask pattern as a verification or a test subject based on the verification-test subject position and illumination condition information about a distribution of an illumination condition in a photomask surface of exposure light incident on the mask pattern, performing lithography simulation on the mask pattern based on the derived illumination condition and the mask pattern, and verifying or testing the mask pattern based on a result of the lithography simulation.
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