Invention Grant
- Patent Title: Vapor based combinatorial processing
- Patent Title (中): 气相组合处理
-
Application No.: US13332813Application Date: 2011-12-21
-
Publication No.: US08409354B2Publication Date: 2013-04-02
- Inventor: Tony P. Chiang , Chi-l Lang , Sunil Shanker
- Applicant: Tony P. Chiang , Chi-l Lang , Sunil Shanker
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C16/458
Abstract:
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
Public/Granted literature
- US20120090545A1 VAPOR BASED COMBINATORIAL PROCESSING Public/Granted day:2012-04-19
Information query
IPC分类:
