Invention Grant
US08409454B2 Production process for structure and production process for liquid discharge head 有权
液体排放头结构和生产工艺的生产工艺

Production process for structure and production process for liquid discharge head
Abstract:
A production process for a structure includes preparing a substrate on which a first layer and a second layer are provided in this order; forming a second mold, which is a part of a mold member serving as a mold for forming the structure, from the second layer; etching the first layer using the second mold as a mask and thereby forming a first mold, which is another part of the mold member from the first layer; providing a coating layer which serves as the structure to cover the first mold and the second mold; and removing the first mold and the second mold and thereby forming the structure.
Information query
Patent Agency Ranking
0/0