Invention Grant
- Patent Title: Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
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Application No.: US13302231Application Date: 2011-11-22
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Publication No.: US08409933B2Publication Date: 2013-04-02
- Inventor: Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
- Applicant: Cem Basceri , Gurtej S. Sandhu , H. Montgomery Manning
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/338 ; H01L21/326

Abstract:
The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.
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