Invention Grant
- Patent Title: Liquid metal ion source, secondary ion mass spectrometer, secondary ion mass spectrometric analysis method and use thereof
- Patent Title (中): 液态金属离子源，二次离子质谱仪，二次离子质谱分析法及其应用
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Application No.: US12739993Application Date: 2008-10-16
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Publication No.: US08410425B2Publication Date: 2013-04-02
- Inventor: Felix Kollmer , Peter Hoerster , Andreas Duetting
- Applicant: Felix Kollmer , Peter Hoerster , Andreas Duetting
- Applicant Address: DE Muenster
- Assignee: Ion-Tof Technologies GmbH
- Current Assignee: Ion-Tof Technologies GmbH
- Current Assignee Address: DE Muenster
- Agency: Eckert Seamans Cherin & Mellott, LLC
- Agent Karl F. Milde, Jr.
- Priority: EP07021097 20071029
- International Application: PCT/EP2008/008781 WO 20081016
- International Announcement: WO2009/056236 WO 20090507
- Main IPC: H01J49/26
- IPC: H01J49/26 ; H01J49/10 ; H01J49/40 ; H01J49/42
Abstract:
A mass spectrometric method according to the Gentle SIMS (G-SIMS) method uses a liquid metal ion source which contains, on the one hand, a first metal with an atomic weight ≧190 U and, on the other hand, another metal with an atomic weight ≦90 U. One of the two types of ions are filtered out alternately from the primary ion beam and directed onto the target as a mass-pure primary ion beam.
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