Invention Grant
- Patent Title: Mass spectrometer
- Patent Title (中): 质谱仪
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Application No.: US13205925Application Date: 2011-08-09
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Publication No.: US08410433B2Publication Date: 2013-04-02
- Inventor: Martin Wuest , Wolfram Knapp
- Applicant: Martin Wuest , Wolfram Knapp
- Applicant Address: CH Bad Ragaz
- Assignee: INFICON GmbH
- Current Assignee: INFICON GmbH
- Current Assignee Address: CH Bad Ragaz
- Agency: Notaro, Michalos & Zaccaria P.C.
- Main IPC: H01J49/26
- IPC: H01J49/26 ; G21K5/04

Abstract:
A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.
Public/Granted literature
- US20110291005A1 MASS SPECTROMETER Public/Granted day:2011-12-01
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