Invention Grant
US08410439B2 X-ray detector for electron microscope 有权
电子显微镜X射线探伤仪

X-ray detector for electron microscope
Abstract:
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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