Invention Grant
- Patent Title: Hollow GST structure with dielectric fill
- Patent Title (中): 空心GST结构与介质填充
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Application No.: US12824749Application Date: 2010-06-28
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Publication No.: US08410468B2Publication Date: 2013-04-02
- Inventor: Jun-Fei Zheng
- Applicant: Jun-Fei Zheng
- Applicant Address: US CT Danbury
- Assignee: Advanced Technology Materials, Inc.
- Current Assignee: Advanced Technology Materials, Inc.
- Current Assignee Address: US CT Danbury
- Agency: Hultquist, PLLC
- Agent Steven J. Hultquist; Maggie Chappuis
- Main IPC: H01L29/02
- IPC: H01L29/02

Abstract:
A memory cell structure, including a substrate having a via therein bound at first and second ends thereof by electrodes. The via is coated on side surfaces thereof with GST material defining a core that is hollow or at least partially filled with material, e.g., germanium or dielectric material. One or more of such memory cell structures may be integrated in a phase change memory device. The memory cell structure can be fabricated in a substrate containing a via closed at one end thereof with a bottom electrode, by conformally coating GST material on sidewall surface of the via and surface of the bottom electrode enclosing the via, to form an open core volume bounded by the GST material, optionally at least partially filling the open core volume with germanium or dielectric material, annealing the GST material film, and forming a top electrode at an upper portion of the via.
Public/Granted literature
- US20110001107A1 HOLLOW GST STRUCTURE WITH DIELECTRIC FILL Public/Granted day:2011-01-06
Information query
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