Invention Grant
- Patent Title: finFETs and methods of making same
- Patent Title (中): finFET及其制造方法
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Application No.: US13228519Application Date: 2011-09-09
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Publication No.: US08410544B2Publication Date: 2013-04-02
- Inventor: Kevin K. Chan , Thomas Safron Kanarsky , Jinghong Li , Christine Qiqing Ouyang , Dae-Gyu Park , Zhibin Ren , Xinhui Wang , Haizhou Yin
- Applicant: Kevin K. Chan , Thomas Safron Kanarsky , Jinghong Li , Christine Qiqing Ouyang , Dae-Gyu Park , Zhibin Ren , Xinhui Wang , Haizhou Yin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Parashos Kalaitzis
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A method of fabricating and a structure of a merged multi-fin finFET. The method includes forming single-crystal silicon fins from the silicon layer of an SOI substrate having a very thin buried oxide layer and merging the end regions of the fins by growing vertical epitaxial silicon from the substrate and horizontal epitaxial silicon from ends of the fins such that vertical epitaxial silicon growth predominates.
Public/Granted literature
- US20110316081A1 finFETS AND METHODS OF MAKING SAME Public/Granted day:2011-12-29
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