Invention Grant
- Patent Title: Semiconductor memory and method of manufacturing the same
- Patent Title (中): 半导体存储器及其制造方法
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Application No.: US12710172Application Date: 2010-02-22
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Publication No.: US08410545B2Publication Date: 2013-04-02
- Inventor: Makoto Mizukami , Hideyuki Funaki
- Applicant: Makoto Mizukami , Hideyuki Funaki
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2007-216323 20070822
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A semiconductor memory includes a semiconductor substrate, a buried insulating film formed on a part of an upper surface of the semiconductor substrate, and a semiconductor layer formed on another part of the upper surface of the semiconductor substrate. Each of the memory cell transistors comprises a first-conductivity-type source region, a first-conductivity-type drain region, and a first-conductivity-type channel region arranged in the semiconductor layer in the column direction, and a gate portion formed on a side surface of the channel region in the row direction.
Public/Granted literature
- US20100187594A1 SEMICONDUCTOR MEMORY AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2010-07-29
Information query
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