Invention Grant
US08410555B2 CMOSFET device with controlled threshold voltage and method of fabricating the same 有权
具有受控阈值电压的CMOSFET器件及其制造方法

CMOSFET device with controlled threshold voltage and method of fabricating the same
Abstract:
There is provided a CMOSFET device with a threshold voltage controlled by means of its gate stack configuration and a method of fabricating the same. The CMOSFET device comprises: a semiconductor substrate; am interface layer grown on the silicon substrate; a first high-k gate dielectric layer deposited on the interface layer; a very thin metal layer deposited on the first high-k gate dielectric layer; a second high-k gate dielectric layer deposited on the very thin metal layer; and a gate electrode layer deposited on the second high-k gate dielectric layer.
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