Invention Grant
US08410555B2 CMOSFET device with controlled threshold voltage and method of fabricating the same
有权
具有受控阈值电压的CMOSFET器件及其制造方法
- Patent Title: CMOSFET device with controlled threshold voltage and method of fabricating the same
- Patent Title (中): 具有受控阈值电压的CMOSFET器件及其制造方法
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Application No.: US12937444Application Date: 2010-06-24
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Publication No.: US08410555B2Publication Date: 2013-04-02
- Inventor: Wenwu Wang , Huilong Zhu , Shijie Chen , Dapeng Chen
- Applicant: Wenwu Wang , Huilong Zhu , Shijie Chen , Dapeng Chen
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Kelly, P.A.
- Priority: CN200910087807 20090626
- International Application: PCT/CN2010/074387 WO 20100624
- International Announcement: WO2010/149058 WO 20101229
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
There is provided a CMOSFET device with a threshold voltage controlled by means of its gate stack configuration and a method of fabricating the same. The CMOSFET device comprises: a semiconductor substrate; am interface layer grown on the silicon substrate; a first high-k gate dielectric layer deposited on the interface layer; a very thin metal layer deposited on the first high-k gate dielectric layer; a second high-k gate dielectric layer deposited on the very thin metal layer; and a gate electrode layer deposited on the second high-k gate dielectric layer.
Public/Granted literature
- US20110169097A1 CMOSFET DEVICE WITH CONTROLLED THRESHOLD VOLTAGE AND METHOD OF FABRICATING THE SAME Public/Granted day:2011-07-14
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