A semiconductor device includes a vertical transistor and an external contact plane. The transistor includes: a first side with a first load electrode and a control electrode, and an opposite second side with a second load electrode. The first side of the transistor faces the external contact plane. A dielectric layer extends from at least one edge side of the transistor as far as the second load terminal. An electrically conductive deposited layer is arranged on the dielectric layer and electrically connects the second load electrode to the second load terminal.