Invention Grant
- Patent Title: Semiconductor device having carbon nanotube interconnects contact deposited with different orientation and method for manufacturing the same
- Patent Title (中): 具有不同取向沉积的碳纳米管互连的半导体器件及其制造方法
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Application No.: US13129321Application Date: 2011-02-26
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Publication No.: US08410609B2Publication Date: 2013-04-02
- Inventor: Huicai Zhong , Qingqing Liang , Zhijiong Luo , Huilong Zhu
- Applicant: Huicai Zhong , Qingqing Liang , Zhijiong Luo , Huilong Zhu
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Alston & Bird LLP
- Priority: CN201010264536 20100826
- International Application: PCT/CN2011/071345 WO 20110226
- International Announcement: WO2012/024918 WO 20120301
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L21/00

Abstract:
The present invention relates to a semiconductor device structure and a method for manufacturing the same; the structure comprises: a semiconductor substrate on which a device structure is formed thereon; an interlayer dielectric layer formed on the device structure, wherein a trench is formed in the interlayer dielectric layer, the trench comprises an incorporated via trench and a conductive wiring trench, and the conductive wiring trench is positioned on the via trench; and a conductive layer filled in the trench, wherein the conductive layer is electrically connected with the device structure; wherein the conductive layer comprises a conductive material and a nanotube/wire layer surrounded by the conductive material. Wherein, the conductive layer comprises a conductive material and a nanotube/wire layer surrounded by the conductive material. The conductive layer of the structure has better thermal conductivity, conductivity and high anti-electromigration capability, thus is able to effectively prevent metal ions from diffusing outwards.
Public/Granted literature
- US20120193798A1 SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-08-02
Information query
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