An electrostatic energy harvester comprises at least a plurality of variable capacitor layers. In one embodiment, at least two of the variable capacitor layers are directly bonded together. In another embodiment, at least two of the variable capacitor layers are bonded together with at least one moving mass layer. Still in another embodiment, at least two of the variable capacitor layers are located at different heights and are located separately from each other. A method of making such a device is also disclosed.