Invention Grant
- Patent Title: Electromechanical transducer and manufacturing method therefor
- Patent Title (中): 机电换能器及其制造方法
-
Application No.: US12673232Application Date: 2008-09-19
-
Publication No.: US08410659B2Publication Date: 2013-04-02
- Inventor: Chienliu Chang
- Applicant: Chienliu Chang
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2007-246920 20070925; JP2008-236379 20080916
- International Application: PCT/JP2008/067589 WO 20080919
- International Announcement: WO2009/041675 WO 20090402
- Main IPC: H02N1/00
- IPC: H02N1/00 ; H04R31/00

Abstract:
An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.
Public/Granted literature
- US20110095645A1 ELECTROMECHANICAL TRANSDUCER AND MANUFACTURING METHOD THEREFOR Public/Granted day:2011-04-28
Information query