Invention Grant
- Patent Title: Method and apparatus for curing thin films on low-temperature substrates at high speeds
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Application No.: US12253399Application Date: 2008-10-17
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Publication No.: US08410712B2Publication Date: 2013-04-02
- Inventor: Kurt A. Schroder , Karl M. Martin , Doug K. Jackson , Steven C. McCool
- Applicant: Kurt A. Schroder , Karl M. Martin , Doug K. Jackson , Steven C. McCool
- Applicant Address: US TX Dallas
- Assignee: NCC Nano, LLC
- Current Assignee: NCC Nano, LLC
- Current Assignee Address: US TX Dallas
- Agency: Yudell Isidore Ng Russell PLLC
- Agent Antony P. Ng
- Main IPC: H05B41/14
- IPC: H05B41/14

Abstract:
A curing apparatus for thermally processing thin films on low-temperature substrates at high speeds is disclosed. The curing apparatus includes a strobe head, a strobe control module and a conveyor control module. The strobe control module controls the power, duration and repetition rate of a set of pulses generated by a flash lamp on the strobe head. The conveyor control module along with the strobe control module provide real-time synchronization between the repetition rate of the set of pulses and the speed at which the substrate is being moved under the strobe head, according to the speed information.
Public/Granted literature
- US20100007285A1 Method and Apparatus for Curing Thin Films on Low-Temperature Substrates at High Speeds Public/Granted day:2010-01-14
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