Invention Grant
US08410861B2 Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
失效
压电振子，振荡器，电子设备和无线电控制时计，以及制造压电振动器的方法
- Patent Title: Piezoelectric vibrator, oscillator, electronic equipment and radio-controlled timepiece, and method of manufacturing piezoelectric vibrator
- Patent Title (中): 压电振子，振荡器，电子设备和无线电控制时计，以及制造压电振动器的方法
-
Application No.: US13035443Application Date: 2011-02-25
-
Publication No.: US08410861B2Publication Date: 2013-04-02
- Inventor: Junya Fukuda
- Applicant: Junya Fukuda
- Applicant Address: JP Chiba
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H01L41/053
Abstract:
A piezoelectric vibrator including a base substrate and a lid substrate which are bonded to each other with a cavity formed therebetween; a piezoelectric vibrating reed which has a pair of vibration arm portions extending in parallel, a pair of excitation electrodes that vibrate the pair of vibration arm portions, and a mount electrode that is electrically connected to the pair of excitation electrodes, the piezoelectric vibrating reed being mounted on the base substrate within the cavity via the mount electrode; an insulation film which is formed on the piezoelectric vibrating reed so as to cover the excitation electrodes; and a getter material formed of the metallic material that is formed on any of the base substrate or the lid substrate so as to be arranged within the cavity and improve a degree of vacuum within the cavity by being heated.
Public/Granted literature
Information query
