Invention Grant
- Patent Title: Shape measurement instrument and shape measurement method
- Patent Title (中): 形状测量仪器和形状测量方法
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Application No.: US12597875Application Date: 2008-04-17
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Publication No.: US08410978B2Publication Date: 2013-04-02
- Inventor: Hiroyuki Sakai , Takeshi Fukuda , Takuya Sakamoto , Toru Sato
- Applicant: Hiroyuki Sakai , Takeshi Fukuda , Takuya Sakamoto , Toru Sato
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-119101 20070427; JP2007-133957 20070521
- International Application: PCT/JP2008/001017 WO 20080417
- International Announcement: WO2008/139687 WO 20081120
- Main IPC: G01S13/89
- IPC: G01S13/89

Abstract:
A shape measurement instrument includes a plurality of transmitters 1 to 4 which radiate signals having different waveforms or phases, receivers 31 to 34 which receive signals reflected from an object O, correlation units 41 to 44 which obtain correlation waveforms between waveforms of the signals received by the receivers 31 to 34, and the signal radiated by a transmitter radiating the received signal of the transmitters 1 to 4, and a shape estimation unit 5 which extracts a quasi-wavefront based on the correlation waveforms obtained by the correlation units 41 to 44 and estimates a shape of the object O based on a relationship between the quasi-wavefront and the object O. As a result, a period of time required to measure an object shape can be significantly reduced.
Public/Granted literature
- US20100127916A1 SHAPE MEASUREMENT INSTRUMENT AND SHAPE MEASUREMENT METHOD Public/Granted day:2010-05-27
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