Invention Grant
- Patent Title: Lithographic apparatus and positioning apparatus
- Patent Title (中): 平版印刷设备和定位设备
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Application No.: US12618832Application Date: 2009-11-16
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Publication No.: US08411247B2Publication Date: 2013-04-02
- Inventor: Noud Jan Gilissen , Theodorus Petrus Maria Cadee
- Applicant: Noud Jan Gilissen , Theodorus Petrus Maria Cadee
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/58 ; G03B27/62

Abstract:
A lithographic apparatus includes a movable first object, and a heat exchanger including a heat exchanging body, the heat exchanging body including a material with electro-caloric or magneto-caloric properties and configured to affect the temperature of the first object by exchanging heat with the movable first object, and a generator configured to supply an electromagnetic field to the heat exchanging body to change the temperature of the heat exchanging body in order to cool or heat the first object.
Public/Granted literature
- US20100141914A1 LITHOGRAPHIC APPARATUS AND POSITIONING APPARATUS Public/Granted day:2010-06-10
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