Invention Grant
- Patent Title: Optical element and illumination optics for microlithography
- Patent Title (中): 用于微光刻的光学元件和照明光学器件
-
Application No.: US12413170Application Date: 2009-03-27
-
Publication No.: US08411251B2Publication Date: 2013-04-02
- Inventor: Michael Gerhard
- Applicant: Michael Gerhard
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102006061711 20061228; DE102007023411 20070518
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03B27/42

Abstract:
The disclosure relates to an optical element and illumination optics for microlithography. The optical element can be configured to influence a nominal beam angle, preset over a beam cross-section, of a radiation beam hitting the optical element. Moreover, the disclosure relates to an illumination optics for the microlithography with at least one such optical element and an illumination system for the microlithography with such an illumination optics.
Public/Granted literature
- US20090201481A1 OPTICAL ELEMENT AND ILLUMINATION OPTICS FOR MICROLITHOGRAPHY Public/Granted day:2009-08-13
Information query