Invention Grant
US08411251B2 Optical element and illumination optics for microlithography 有权
用于微光刻的光学元件和照明光学器件

Optical element and illumination optics for microlithography
Abstract:
The disclosure relates to an optical element and illumination optics for microlithography. The optical element can be configured to influence a nominal beam angle, preset over a beam cross-section, of a radiation beam hitting the optical element. Moreover, the disclosure relates to an illumination optics for the microlithography with at least one such optical element and an illumination system for the microlithography with such an illumination optics.
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