Invention Grant
- Patent Title: Surface shape measurement apparatus
- Patent Title (中): 表面形状测量装置
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Application No.: US12891736Application Date: 2010-09-27
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Publication No.: US08411280B2Publication Date: 2013-04-02
- Inventor: Ryuichi Sato
- Applicant: Ryuichi Sato
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-229993 20091001; JP2010-083402 20100331
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B11/30

Abstract:
An apparatus for measuring a shape of a surface, comprises a measurement head which measures at least one of a distance between a reference point and the surface and a direction of a normal from the surface to the reference point, a scanning mechanism which scans the measurement head, and a processor which calculates the shape of the surface based on a measurement result measured using the measurement head and coordinates of the reference point, wherein the coordinates of the reference point are calibrated using a measurement result measured by scanning the measurement head along a scanning path in association with a first surface to be measured, and a shape of a second surface to be measured is calculated based on a measurement result measured by scanning the measurement head along the same scanning path in association with the second surface, and the calibrated coordinates of the reference point.
Public/Granted literature
- US20110080593A1 SURFACE SHAPE MEASUREMENT APPARATUS Public/Granted day:2011-04-07
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