Invention Grant
US08413084B2 Photomask throughput by reducing exposure shot count for non-critical elements
失效
通过减少非关键元素的曝光拍摄数量来获得光掩模吞吐量
- Patent Title: Photomask throughput by reducing exposure shot count for non-critical elements
- Patent Title (中): 通过减少非关键元素的曝光拍摄数量来获得光掩模吞吐量
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Application No.: US12896947Application Date: 2010-10-04
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Publication No.: US08413084B2Publication Date: 2013-04-02
- Inventor: Jed H. Rankin
- Applicant: Jed H. Rankin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Richard M. Kotulak
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G03F1/00

Abstract:
A solution for improving photomask fabrication time and yield, through the reduction in the number of exposure shots used for a given photomask pattern to be written on the photomask. In one embodiment, non-critical elements can be configured into a shape that the write tool can write with less exposure shots, while maintaining the original intent of the non-critical element. In another embodiment, the pattern of non-critical elements can be configured such that the non-critical elements are aligned with the grid lines of the operational grid of the write tool to further reduce shot count. In another embodiment, the manufacturing parameters and placement of non-critical elements can be modifying, e.g., by identifying which elements are critical and which are non-critical, and then printing non-critical elements with a first exposure parameter (e.g. a single pass exposure) while critical elements are printed with a second exposure parameter (e.g., a multi pass exposure).
Public/Granted literature
- US20120082923A1 PHOTOMASK THROUGHPUT BY REDUCING EXPOSURE SHOT COUNT FOR NON-CRITICAL ELEMENTS Public/Granted day:2012-04-05
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