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Invention Grant
US08413509B2 Spring member for use in a microelectromechanical systems sensor 有权
用于微机电系统传感器的弹簧构件

Spring member for use in a microelectromechanical systems sensor
Abstract:
A device (96) includes a microelectromechanical (MEMS) sensor (40). The sensor (40) includes a movable element (42) adapted for motion in a direction (44) and an anchor (46) coupled to a substrate (48). The MEMS sensor (40) further includes spring members (50) interconnected between the movable element (42) and the anchor (46). Each of the spring members (50) includes beams (56, 58, 60) arranged in substantially parallel alignment, with the beam (60) positioned between the other beams (56, 58). Each of the beams (56, 58) is coupled to the anchor (46) and the beam (60) is coupled to the movable element (42). Each of the spring members (50) further includes a support structure (64) joined with the beams (56, 58) to provide vertical stiffness to the beams (56, 58) of the spring member (50).
Abstract(Chinese):

装置（96）包括微机电（MEMS）传感器（40）。 传感器（40）包括适于沿着方向（44）运动的可移动元件（42）和联接到基板（48）的锚定件（46）。 MEMS传感器（40）还包括在可移动元件（42）和锚（46）之间互连的弹簧元件（50）。 每个弹簧构件（50）包括以基本上平行对准的方式布置的梁（56,58,60），其中梁（60）定位在另一个梁（56,58）之间。 每个梁（56,58）联接到锚（46），并且梁（60）联接到可移动元件（42）。 每个弹簧构件（50）还包括与梁（56,58）连接的支撑结构（64），以向弹簧构件（50）的梁（56,58）提供垂直刚度。

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