Invention Grant
- Patent Title: Sputter tray moving system
- Patent Title (中): 溅射盘移动系统
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Application No.: US12487806Application Date: 2009-06-19
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Publication No.: US08413796B2Publication Date: 2013-04-09
- Inventor: Yang-Soo Kim , Young-Min Kee , Chang-Jin Kim , Byung-Hun Kim
- Applicant: Yang-Soo Kim , Young-Min Kee , Chang-Jin Kim , Byung-Hun Kim
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2008-0104178 20081023
- Main IPC: B65G13/06
- IPC: B65G13/06

Abstract:
A sputter tray moving system includes a sputter tray, a guide disposed under the sputter tray and including a groove, a pulley engaged with the groove of the guide and a buffer member disposed between the sputter tray and the guide. The sputter tray is moved when the pulley engaged with the groove of the guide is rotated in a rotation direction.
Public/Granted literature
- US20100101920A1 SPUTTER TRAY MOVING SYSTEM Public/Granted day:2010-04-29
Information query
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