Invention Grant
US08413796B2 Sputter tray moving system 失效
溅射盘移动系统

Sputter tray moving system
Abstract:
A sputter tray moving system includes a sputter tray, a guide disposed under the sputter tray and including a groove, a pulley engaged with the groove of the guide and a buffer member disposed between the sputter tray and the guide. The sputter tray is moved when the pulley engaged with the groove of the guide is rotated in a rotation direction.
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