Invention Grant
US08413814B2 Front opening unified pod disposed with purgeable supporting module
有权
前开口统一吊舱配有可清洗支撑模块
- Patent Title: Front opening unified pod disposed with purgeable supporting module
- Patent Title (中): 前开口统一吊舱配有可清洗支撑模块
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Application No.: US12952528Application Date: 2010-11-23
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Publication No.: US08413814B2Publication Date: 2013-04-09
- Inventor: Chen-Wei Ku , Shao-Wei Lu , Ming-Long Chiu
- Applicant: Chen-Wei Ku , Shao-Wei Lu , Ming-Long Chiu
- Applicant Address: TW Taipei County
- Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee: Gudeng Precision Industrial Co, Ltd
- Current Assignee Address: TW Taipei County
- Agency: Sinorica, LLC
- Agent Ming Chow
- Priority: TW99134683A 20101012
- Main IPC: B65D85/30
- IPC: B65D85/30 ; H01L21/673

Abstract:
A Front Opening Unified Pod (FOUP) having a purgeable supporting module disposed at the junction of each sidewall and the backwall of the container, the characteristic of the FOUP being in that: the purgeable supporting module has a buffer gas chamber and a gas inlet is disposed at one end of the buffer gas chamber and connected to a gas valve on the bottom surface, an outgassing channel is disposed on the purgeable supporting module facing the opening of the FOUP, and a long slot is disposed on one side of the outgassing channel, an airflow channel being disposed between and thus connecting the outgassing channel and the buffer gas chamber, and a plurality of supporting ribs being vertically disposed on one side of the long slot at intervals.
Public/Granted literature
- US20110062052A1 Front Opening Unified Pod disposed with purgeable supporting module Public/Granted day:2011-03-17
Information query
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