Invention Grant
- Patent Title: Double side polishing apparatus and carrier therefor
- Patent Title (中): 双面抛光装置及其载体
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Application No.: US12700362Application Date: 2010-02-04
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Publication No.: US08414360B2Publication Date: 2013-04-09
- Inventor: Chi-Bok Lee , Heui-Don Cho
- Applicant: Chi-Bok Lee , Heui-Don Cho
- Applicant Address: KR Gumi
- Assignee: Siltron, Inc.
- Current Assignee: Siltron, Inc.
- Current Assignee Address: KR Gumi
- Agency: Greer, Burns & Crain, Ltd.
- Priority: KR10-2009-0077525 20090821
- Main IPC: B24B7/17
- IPC: B24B7/17 ; B24B41/06

Abstract:
A double side polishing apparatus comprises an upper polishing plate and a lower polishing plate for polishing both sides of a wafer; a plurality of carriers, each including a center plate and a circumferential plate, the center plate having a mounting hole where the wafer is mounted, the circumferential plate having a fitting hole where the center plate is fitted and a gear part formed along the outer periphery thereof, the center of the mounting hole being eccentric from the center of the center plate, the center of the fitting hole being eccentric from the center of the circumferential plate; and a sun gear and an internal gear engaged with the gear part to transmit a rotational force to the plurality of carriers, wherein a fitting direction of a center plate into a fitting hole is adjustable for at least two carriers among the plurality of carriers.
Public/Granted literature
- US20110045748A1 DOUBLE SIDE POLISHING APPARATUS AND CARRIER THEREFOR Public/Granted day:2011-02-24
Information query
IPC分类: