Invention Grant
- Patent Title: Method for manufacturing silicon single crystal in which a crystallization temperature gradient is controlled
- Patent Title (中): 制造结晶温度梯度的硅单晶的制造方法
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Application No.: US12683515Application Date: 2010-01-07
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Publication No.: US08414701B2Publication Date: 2013-04-09
- Inventor: Keiichi Takanashi
- Applicant: Keiichi Takanashi
- Applicant Address: JP Tokyo
- Assignee: Sumco Corporation
- Current Assignee: Sumco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2009-005002 20090113
- Main IPC: C30B15/26
- IPC: C30B15/26

Abstract:
In this method for manufacturing a silicon single crystal, when growing the silicon single crystal, in order to control the V/G value with high accuracy so as to yield a desired defect-free region, it is important to conduct the pulling at a constant pulling rate. In the method for pulling a silicon single crystal in the present invention, in order to control the V/G value with high accuracy, the distance Δt between the melt surface of the silicon melt and the heat shielding member that is disposed so as to oppose to and to partially cover this melt surface is continuously measured while pulling (growing) the silicon single crystal.
Public/Granted literature
- US20100175611A1 METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL Public/Granted day:2010-07-15
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