Invention Grant
- Patent Title: Versatile system for self-aligning deposition equipment
- Patent Title (中): 用于自对准沉积设备的多功能系统
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Application No.: US11756361Application Date: 2007-05-31
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Publication No.: US08414734B2Publication Date: 2013-04-09
- Inventor: Martin B. Garcia
- Applicant: Martin B. Garcia
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Alan A. R. Cooper; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/36
- IPC: H01L21/36 ; C23C16/52 ; C23C16/54

Abstract:
The present invention provides a system (100) for aligning a dispensing apparatus (110) utilized within a semiconductor deposition chamber (102). A stationary reference apparatus (106) is disposed along the bottom of the deposition chamber. A self-alignment support system (122), comprising one or more support components (124), is intercoupled between the dispensing apparatus and a deposition system exterior component (112). The self-alignment support system is adapted to facilitate and secure repositioning of the dispensing apparatus responsive to pressure applied to the dispensing surface (114) thereof. A non-yielding offset component (126) is placed upon a first surface (108) of the stationary reference apparatus. The dispensing surface of the dispensing apparatus is engaged with the offset component, and pressure is applied to the dispensing apparatus via the offset component until a desired alignment is achieved.
Public/Granted literature
- US20070221124A1 Versatile System for Self-Aligning Deposition Equipment Public/Granted day:2007-09-27
Information query
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