Invention Grant
US08414786B2 Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate 有权
平面加热器堆叠和方法,用于在基板上方的平面加热器基底内制造具有空腔的平面加热器堆叠

Planar heater stack and method for making planar heater stack with cavity within planar heater substrata above substrate
Abstract:
A heater stuck includes first strata having a planar configuration supporting and forming a fluid heater element responsive to repetitive electrical activation and deactivation to produce repetitive cycles of fluid ejection from an ejection chamber above the heater element and second strata having a planar configuration coating the heater element of the first strata and being contiguous with the ejection chamber to protect the heater element. The first strata include a substrate and heater strata disposed on it and forming a cavity above the substrate and encompassed on three sides by the heater substrata. The heater substrata includes a pair of conductive layer portions constituting terminal leads disposed on the substrate at opposite sides of the cavity and a resistive layer disposed on the conductive layer portions and defining the fluid heater element that spans the top of the cavity.
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