Invention Grant
- Patent Title: In-line film forming apparatus and manufacturing method of magnetic recording medium
- Patent Title (中): 在线成膜装置及磁记录介质的制造方法
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Application No.: US12491887Application Date: 2009-06-25
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Publication No.: US08414968B2Publication Date: 2013-04-09
- Inventor: Satoru Ueno
- Applicant: Satoru Ueno
- Applicant Address: JP Tokyo
- Assignee: Showa Denko K.K.
- Current Assignee: Showa Denko K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-168630 20080627
- Main IPC: G11B5/00
- IPC: G11B5/00 ; G11B17/00 ; G11B21/00 ; H01L21/677 ; B66C1/00 ; B65G15/58

Abstract:
An in-line film forming apparatus capable of conveying a carrier at a high speed, increasing the exhaust capability within a film forming chamber, and easily realizing a high vacuum degree in a short time is provided. A conveyor mechanism has a linear motor drive mechanism which drives the carrier in a noncontact state, a horizontal guide mechanism which is provided so as to be able to contact a side portion of the carrier, and guides the carrier driven by the linear motor drive mechanism in a horizontal direction, and a vertical guide mechanism which is provided so as to be able to contact a lower end of the carrier, and guides the carrier driven by the linear motor drive mechanism in the vertical direction.
Public/Granted literature
- US20090324813A1 IN-LINE FILM FORMING APPARATUS AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM Public/Granted day:2009-12-31
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