Certain example embodiments relate to a method of forming a coating on a glass substrate using combustion deposition. A glass substrate having at least one surface to be coated is provided. An organosiloxane inclusive precursor having a ring- or cage-like structure to be combusted is introduced. Using at least one flame, at least a portion of the precursor is combusted to form a combusted material, the combusted material including non-vaporized material. The glass substrate is provided in an area so that the glass substrate is heated sufficiently to allow the combusted material to form the coating, directly or indirectly, on the glass substrate. In certain example embodiments, the precursor is a cyclic siloxane based and/or polyhedral silsesquioxane (POSS) based precursor, which advantageously may affect the coating's transmission and/or reflection properties compared to conventionally used silicon precursors. For example, a single-layer anti-reflective coating including silicon oxide may increase visible transmission of the uncoated substrate by at least about 2.0 %.