Invention Grant
- Patent Title: Method of manufacturing silicon nanotubes using doughnut-shaped catalytic metal layer
- Patent Title (中): 使用环形催化金属层制造硅纳米管的方法
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Application No.: US12304739Application Date: 2006-12-08
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Publication No.: US08414974B2Publication Date: 2013-04-09
- Inventor: Rae-Man Park , Sang-Hyeob Kim , Sunglyul Maeng , Jonghyurk Park
- Applicant: Rae-Man Park , Sang-Hyeob Kim , Sunglyul Maeng , Jonghyurk Park
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0053897 20060615
- International Application: PCT/KR2006/005308 WO 20061208
- International Announcement: WO2007/145406 WO 20071221
- Main IPC: C23C16/24
- IPC: C23C16/24

Abstract:
Provided is a method of manufacturing silicon nanotubes including forming non-catalytic metal islands on a substrate; forming catalyst metal doughnuts to surround the non-catalytic metal islands; and growing silicon nanotubes on the catalyst metal doughnuts. The silicon nanotubes are efficiently grown using the catalyst metal doughnuts.
Public/Granted literature
- US20090123649A1 METHOD OF MANUFACTURING SILICON NANOTUBES USING DOUGHNUT-SHAPED CATALYTIC METAL LAYER Public/Granted day:2009-05-14
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