Invention Grant
US08414977B2 Masking jig, substrate heating device, and coating method 有权
掩模夹具,基板加热装置和涂布方法

Masking jig, substrate heating device, and coating method
Abstract:
A masking jig for specifying a coating region on which a coating is formed by spraying copper powder onto a front surface of an insulating substrate from a cold spray device. This masking jig includes a metal member formed with an opening for specifying the coating region and placed in contact with the front surface of the insulating substrate. The metal member internally includes a heating wire is provided to heat the vicinity of the opening. A cooler is connected to a back surface of the insulating substrate.
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