Invention Grant
- Patent Title: Resist composition, method of forming resist pattern, novel compound, and acid generator
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Application No.: US13478291Application Date: 2012-05-23
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Publication No.: US08415085B2Publication Date: 2013-04-09
- Inventor: Hideo Hada , Yoshiyuki Utsumi , Takehiro Seshimo , Akiya Kawaue
- Applicant: Hideo Hada , Yoshiyuki Utsumi , Takehiro Seshimo , Akiya Kawaue
- Applicant Address: JP Kanagawa-ken
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JPP2008-291054 20081113; JPP2008-291055 20081113; JPP2008-291056 20081113
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/038 ; G03F7/039 ; G03F7/20 ; G03F7/30

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid and an acid-generator component (B) including a compound represented by (b1-1), a compound represented by (b1-1′) and/or a compound represented by (b1-1″) (R1″-R3″ represents an aryl group or an alkyl group, provided that at least one of R1″-R3″ represents a substituted aryl group being substituted with a group represented by (b1-1-0), and two of R1″-R3″ may be mutually bonded to form a ring with the sulfur atom; X represents a C3-C30 hydrocarbon group; Q1 represents a carbonyl group-containing divalent linking group; X10 represents a C1-C30 hydrocarbon group; Q3 represents a single bond or a divalent linking group; Y10 represents —C(═O)— or —SO2—; Y11 represents a C1-C10 alkyl group or a fluorinated alkyl group: Q2 represents a single bond or an alkylene group; and W represents a C2-C10 alkylene group).
Public/Granted literature
- US20120264061A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUND, AND ACID GENERATOR Public/Granted day:2012-10-18
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