Invention Grant
- Patent Title: Manufacturing method of thin film transistor array substrate and liquid crystal display panel
- Patent Title (中): 薄膜晶体管阵列基板和液晶显示面板的制造方法
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Application No.: US12645448Application Date: 2009-12-22
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Publication No.: US08415182B2Publication Date: 2013-04-09
- Inventor: An-Thung Cho , Chia-Tien Peng , Yuan-Jun Hsu , Ching-Chieh Shih , Chien-Sen Weng , Kun-Chih Lin , Hang-Wei Tseug , Ming-Huang Chuang
- Applicant: An-Thung Cho , Chia-Tien Peng , Yuan-Jun Hsu , Ching-Chieh Shih , Chien-Sen Weng , Kun-Chih Lin , Hang-Wei Tseug , Ming-Huang Chuang
- Applicant Address: TW Hsinchu
- Assignee: Au Optronics Corporation
- Current Assignee: Au Optronics Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW97118209A 20080516; TW97151836A 20081231
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
A manufacturing method of a thin film transistor array substrate is provided. In the method, a substrate having a display region and a sensing region is provided. At least a display thin film transistor is formed in the display region, a first sensing electrode is formed in the sensing region, and an inter-layer dielectric layer is disposed on the substrate, covers the display thin film transistor, and exposes the first sensing electrode. A patterned photo sensitive dielectric layer is then formed on the first sensing electrode. A patterned transparent conductive layer is subsequently formed on the substrate, wherein the patterned transparent conductive layer includes a pixel electrode coupled to the corresponding display thin film transistor and includes a second sensing electrode located on the patterned photo sensitive dielectric layer. A manufacturing method of a liquid crystal display panel adopting the aforementioned thin film transistor array substrate is also provided.
Public/Granted literature
- US20100099206A1 MANUFACTURING METHOD OF THIN FILM TRANSISTOR ARRAY SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL Public/Granted day:2010-04-22
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