Invention Grant
- Patent Title: Method for manufacturing nitride semiconductor laser element
- Patent Title (中): 氮化物半导体激光元件的制造方法
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Application No.: US13225935Application Date: 2011-09-06
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Publication No.: US08415188B2Publication Date: 2013-04-09
- Inventor: Hitoshi Maegawa , Mitsuhiro Nonaka , Yasunobu Sugimoto
- Applicant: Hitoshi Maegawa , Mitsuhiro Nonaka , Yasunobu Sugimoto
- Applicant Address: JP Anan-shi
- Assignee: Nichia Corporation
- Current Assignee: Nichia Corporation
- Current Assignee Address: JP Anan-shi
- Agency: Global IP Counselors, LLP
- Priority: JP2010-201087 20100908
- Main IPC: H01L33/26
- IPC: H01L33/26

Abstract:
A method for manufacturing a nitride semiconductor laser element has: (a) forming a nitride semiconductor layer on a substrate; (b) forming a ridge on a surface of the nitride semiconductor; (c) forming a first protective film on the nitride semiconductor layer including the ridge; (d) removing the first protective film from at least a top face of the ridge; (e) forming a conductive layer composed of a two or more of multilayer film with different compositions on the first protective film and the nitride semiconductor layer including the ridge, and introducing a gap at locations of at least at the uppermost conductive layer corresponding to the base portion from the ridge shoulders; and (f) removing part of the conductive layer through a gap to form a void defined by the first protective film and the conductive layer at least on the ridge base portions.
Public/Granted literature
- US20120058585A1 METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR LASER ELEMENT Public/Granted day:2012-03-08
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