Invention Grant
- Patent Title: Field effect transistor and method for manufacturing the same
- Patent Title (中): 场效应晶体管及其制造方法
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Application No.: US13284889Application Date: 2011-10-29
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Publication No.: US08415210B2Publication Date: 2013-04-09
- Inventor: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Dong-Uk Choi , Kyoung-Hwan Yeo
- Applicant: Chang-Woo Oh , Dong-Gun Park , Dong-Won Kim , Dong-Uk Choi , Kyoung-Hwan Yeo
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR2004-44512 20040616
- Main IPC: H01L21/337
- IPC: H01L21/337 ; H01L21/8234

Abstract:
A field effect transistor (FET) and a method for manufacturing the same, in which the FET may include an isolation film formed on a semiconductor substrate to define an active region, and a gate electrode formed on a given portion of the semiconductor substrate. A channel layer may be formed on a portion of the gate electrode, with source and drain regions formed on either side of the channel layer so that boundaries between the channel layer and the source and drain regions of the FET may be perpendicular to a surface of the semiconductor substrate.
Public/Granted literature
- US20120058613A1 FIELD EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-03-08
Information query
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