Invention Grant
US08415216B2 Multi-gate non-planar field effect transistor structure and method of forming the structure using a dopant implant process to tune device drive current
有权
多栅极非平面场效应晶体管结构和使用掺杂剂注入工艺形成该结构的方法来调谐器件驱动电流
- Patent Title: Multi-gate non-planar field effect transistor structure and method of forming the structure using a dopant implant process to tune device drive current
- Patent Title (中): 多栅极非平面场效应晶体管结构和使用掺杂剂注入工艺形成该结构的方法来调谐器件驱动电流
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Application No.: US13406652Application Date: 2012-02-28
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Publication No.: US08415216B2Publication Date: 2013-04-09
- Inventor: Brent A. Anderson , Edward J. Nowak
- Applicant: Brent A. Anderson , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Disclosed are embodiments of a semiconductor structure that includes one or more multi-gate field effect transistors (MUGFETs), each MUGFET having one or more semiconductor fins. In the embodiments, dopant implant region is incorporated into the upper portion of the channel region of a semiconductor fin in order to selectively modify (i.e., decrease or increase) the threshold voltage within that upper portion relative to the threshold voltage in the lower portion and, thereby to selectively modify (i.e., decrease or increase) device drive current. In the case of a multiple semiconductor fins, the use of implant regions, the dopant conductivity type in the implant regions and/or the sizes of the implant regions can be varied from fin to fin within a multi-fin MUGFET or between different single and/or multi-fin MUGFETs so that individual device drive current can be optimized. Also disclosed herein are embodiments of a method of forming the semiconductor structure.
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