Invention Grant
- Patent Title: Constrained oxidation of suspended micro- and nano-structures
- Patent Title (中): 悬浮微结构和纳米结构的约束氧化
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Application No.: US12709981Application Date: 2010-02-22
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Publication No.: US08415220B2Publication Date: 2013-04-09
- Inventor: Tymon Barwicz
- Applicant: Tymon Barwicz
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L21/336
- IPC: H01L21/336
Abstract:
Techniques for preventing bending/buckling of suspended micro/nanostructures during oxidation are provided. In one aspect, a method for oxidizing a structure is provided. The method includes providing the structure having at least one suspended element selected from the group consisting of: a microstructure, a nanostructure and a combination thereof; surrounding the at least one suspended element in a cladding material; and oxidizing the at least one suspended element through the cladding material, wherein the cladding material physically constrains and thereby prevents distortion of the at least one suspended element during the oxidation.
Public/Granted literature
- US20110207335A1 Constrained Oxidation of Suspended Micro- and Nano-Structures Public/Granted day:2011-08-25
Information query
IPC分类:
