Invention Grant
- Patent Title: Selective copper encapsulation layer deposition
- Patent Title (中): 选择性铜包层沉积
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Application No.: US12683857Application Date: 2010-01-07
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Publication No.: US08415252B2Publication Date: 2013-04-09
- Inventor: Tien-Jen Cheng , Abhishek Dube , Zhengwen Li , Huilong Zhu
- Applicant: Tien-Jen Cheng , Abhishek Dube , Zhengwen Li , Huilong Zhu
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Joseph P. Abate, Esq.
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A metal interconnect structure provides high adhesive strength between copper atoms in a copper-containing structure and a self-aligned copper encapsulation layer, which is selectively deposited only on exposed copper surfaces. A lower level metal interconnect structure comprises a first dielectric material layer and a copper-containing structure embedded in a lower metallic liner. After a planarization process that forms the copper-containing structure, a material that forms Cu—S bonds with exposed surfaces of the copper-containing structure is applied to the surface of the copper-containing structure. The material is selectively deposited only on exposed Cu surfaces, thereby forming a self-aligned copper encapsulation layer, and provides a high adhesion strength to the copper surface underneath. A dielectric cap layer and an upper level metal interconnect structure can be subsequently formed on the copper encapsulation layer.
Public/Granted literature
- US20110162875A1 SELECTIVE COPPER ENCAPSULATION LAYER DEPOSITION Public/Granted day:2011-07-07
Information query
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