Invention Grant
- Patent Title: Single mask adder phase change memory element
- Patent Title (中): 单掩模加法器相变存储元件
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Application No.: US13419522Application Date: 2012-03-14
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Publication No.: US08415653B2Publication Date: 2013-04-09
- Inventor: Matthew J. Breitwisch , Chandrasekharan Kothandaraman , Chung H. Lam
- Applicant: Matthew J. Breitwisch , Chandrasekharan Kothandaraman , Chung H. Lam
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A method of fabricating a phase change memory element within a semiconductor structure includes etching an opening to an upper surface of a bottom electrode, the opening being formed of a height equal to a height of a metal region at a same layer within the semiconductor structure, depositing phase change material within the opening, recessing the phase change material within the opening, and forming a top electrode on the recessed phase change material.
Public/Granted literature
- US20120168709A1 SINGLE MASK ADDER PHASE CHANGE MEMORY ELEMENT Public/Granted day:2012-07-05
Information query
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