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US08415653B2 Single mask adder phase change memory element 有权
单掩模加法器相变存储元件

Single mask adder phase change memory element
Abstract:
A method of fabricating a phase change memory element within a semiconductor structure includes etching an opening to an upper surface of a bottom electrode, the opening being formed of a height equal to a height of a metal region at a same layer within the semiconductor structure, depositing phase change material within the opening, recessing the phase change material within the opening, and forming a top electrode on the recessed phase change material.
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