Invention Grant
- Patent Title: Methods of producing high uniformity in thin film transistor devices fabricated on laterally crystallized thin films
- Patent Title (中): 在横向结晶的薄膜上制造的薄膜晶体管器件产生高均匀性的方法
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Application No.: US12679543Application Date: 2008-09-25
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Publication No.: US08415670B2Publication Date: 2013-04-09
- Inventor: James S. Im
- Applicant: James S. Im
- Applicant Address: US NY New York
- Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee: The Trustees of Columbia University in the City of New York
- Current Assignee Address: US NY New York
- Agency: Wilmer Cutler Pickering Hale and Dorr LLP
- International Application: PCT/US2008/077704 WO 20080925
- International Announcement: WO2009/042784 WO 20090402
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
Methods of producing high uniformity in thin film transistor devices fabricated on laterally crystallized thin films are described. A thin film transistor (TFT) includes a channel area disposed in a crystalline substrate, which has grain boundaries that are approximately parallel with each other and are spaced apart with approximately equal spacings. The shape of the channel area includes a non-equiangular polygon that has two opposing side edges that are oriented substantially perpendicular to the grain boundaries. The polygon further has an upper edge and a lower edge. At least a portion of each of the upper and lower edges is oriented at a tilt angle with respect to the grain boundaries. The tilt angles are selected such that the number of grain boundaries covered by the polygon is independent of the location of the channel area within the crystalline substrate.
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