Invention Grant
- Patent Title: Semiconductor memory device and method for fabricating the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US12650345Application Date: 2009-12-30
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Publication No.: US08415733B2Publication Date: 2013-04-09
- Inventor: Hee Jung Yang
- Applicant: Hee Jung Yang
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2009-0058727 20090630
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor memory device has an asymmetric buried gate structure with a stepped top surface and a method for fabricating the same. The method for fabricating the semiconductor memory device includes: etching a predetermined region of a semiconductor substrate to form an isolation layer defining an active region; forming a recess within the active region; forming a metal layer filling the recess; asymmetrically etching the metal layer to form an asymmetric gate having a stepped top surface at a predetermined portion of the recess; and forming a capping oxide layer filling a remaining portion of the recess where the asymmetric gate is not formed, thereby obtaining an asymmetric buried gate including the asymmetric gate and the capping oxide layer.
Public/Granted literature
- US20100327337A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2010-12-30
Information query
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