Invention Grant
US08415733B2 Semiconductor memory device and method for fabricating the same 失效
半导体存储器件及其制造方法

  • Patent Title: Semiconductor memory device and method for fabricating the same
  • Patent Title (中): 半导体存储器件及其制造方法
  • Application No.: US12650345
    Application Date: 2009-12-30
  • Publication No.: US08415733B2
    Publication Date: 2013-04-09
  • Inventor: Hee Jung Yang
  • Applicant: Hee Jung Yang
  • Applicant Address: KR Icheon
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2009-0058727 20090630
  • Main IPC: H01L27/108
  • IPC: H01L27/108
Semiconductor memory device and method for fabricating the same
Abstract:
A semiconductor memory device has an asymmetric buried gate structure with a stepped top surface and a method for fabricating the same. The method for fabricating the semiconductor memory device includes: etching a predetermined region of a semiconductor substrate to form an isolation layer defining an active region; forming a recess within the active region; forming a metal layer filling the recess; asymmetrically etching the metal layer to form an asymmetric gate having a stepped top surface at a predetermined portion of the recess; and forming a capping oxide layer filling a remaining portion of the recess where the asymmetric gate is not formed, thereby obtaining an asymmetric buried gate including the asymmetric gate and the capping oxide layer.
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