Invention Grant
- Patent Title: Sensor for detecting thermal radiation
- Patent Title (中): 用于检测热辐射的传感器
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Application No.: US12806347Application Date: 2010-08-10
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Publication No.: US08415760B2Publication Date: 2013-04-09
- Inventor: Thorsten Mueller , Ando Feyh
- Applicant: Thorsten Mueller , Ando Feyh
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009029343 20090910
- Main IPC: H01L29/66
- IPC: H01L29/66
Abstract:
A sensor having a monolithically integrated structure for detecting thermal radiation includes: a carrier substrate, a cavity, and at least one sensor element for detecting thermal radiation. Incident thermal radiation strikes the sensor element via the carrier substrate. The sensor element is suspended in the cavity by a suspension.
Public/Granted literature
- US20110057285A1 Sensor for detecting thermal radiation Public/Granted day:2011-03-10
Information query
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