Invention Grant
- Patent Title: Tunable semiconductor device
- Patent Title (中): 可调谐半导体器件
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Application No.: US13076781Application Date: 2011-03-31
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Publication No.: US08415763B2Publication Date: 2013-04-09
- Inventor: David Louis Harame , Alvin Jose Joseph , Qizhi Liu , Ramana Murty Malladi
- Applicant: David Louis Harame , Alvin Jose Joseph , Qizhi Liu , Ramana Murty Malladi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jason H Sosa; David A. Cain
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
Embodiments of the invention include a method for forming a tunable semiconductor device and the resulting structure. The invention comprises forming a semiconductor substrate. Next, pattern a first mask over the semiconductor substrate. Dope regions of the semiconductor substrate not protected by the first mask to form a first discontinuous subcollector. Remove the first mask. Pattern a second mask over the semiconductor substrate. Dope regions of the semiconductor substrate not protected by the second mask and on top of the first discontinuous subcollector to form a second discontinuous subcollector. Remove the second mask and form a collector above the second discontinuous subcollector. Breakdown voltage of the device may be tuned by varying the gaps separating doped regions within the first and second discontinuous subcollectors. Doped regions of the first and second discontinuous subcollectors may be formed in a mesh pattern.
Public/Granted literature
- US20120248573A1 TUNABLE SEMICONDUCTOR DEVICE Public/Granted day:2012-10-04
Information query
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