Invention Grant
- Patent Title: Apparatus and methods for uniform metal plating
- Patent Title (中): 用于均匀金属电镀的装置和方法
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Application No.: US13462651Application Date: 2012-05-02
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Publication No.: US08415770B2Publication Date: 2013-04-09
- Inventor: Jens A. Riege , Heather L. Knoedler , Shiban K. Tiku
- Applicant: Jens A. Riege , Heather L. Knoedler , Shiban K. Tiku
- Applicant Address: US MA Woburn
- Assignee: Skyworks Solutions, Inc.
- Current Assignee: Skyworks Solutions, Inc.
- Current Assignee Address: US MA Woburn
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H01L23/544
- IPC: H01L23/544

Abstract:
Apparatus and methods for uniform metal plating onto a semiconductor wafer, such as GaAs wafer, are disclosed. One such apparatus can include an anode and a showerhead body. The anode can include an anode post and a showerhead anode plate. The showerhead anode plate can include holes sized to dispense a particular plating solution, such as plating solution that includes gold, onto a wafer. The showerhead body can be coupled to the anode post and the showerhead anode plate. The showerhead body can be configured to create a seal sufficient to substantially prevent a reduction of pressure in the plating solution flowing from the anode post to holes of the showerhead anode plate.
Public/Granted literature
- US20120211888A1 APPARATUS AND METHODS FOR UNIFORM METAL PLATING Public/Granted day:2012-08-23
Information query
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