Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US13142631Application Date: 2011-02-24
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Publication No.: US08415806B2Publication Date: 2013-04-09
- Inventor: Huilong Zhu
- Applicant: Huilong Zhu
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Troutman Sanders LLP
- Priority: CN201010215093 20100622
- International Application: PCT/CN2011/000290 WO 20110224
- International Announcement: WO2011/160419 WO 20111229
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
The application discloses a semiconductor structure and a method for manufacturing the same. The semiconductor structure comprises: a semiconductor substrate comprising a first surface and a second surface opposite to each other; and a silicon via formed through the semiconductor substrate, wherein the silicon via comprises a first via formed through the first surface; and a second via formed through the second surface and electrically connected with the first via, wherein the first and second vias are formed individually. Embodiments of the invention are applicable to the manufacture of a 3D integrated circuit.
Public/Granted literature
- US20120056323A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-03-08
Information query
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