Invention Grant
- Patent Title: Measuring sheet resistance and other properties of a semiconductor
- Patent Title (中): 测量薄膜电阻等半导体性能
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Application No.: US12961932Application Date: 2010-12-07
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Publication No.: US08415961B1Publication Date: 2013-04-09
- Inventor: Guoheng Zhao , Alex Salnik , Lena Nicolaides , Ady Levy
- Applicant: Guoheng Zhao , Alex Salnik , Lena Nicolaides , Ady Levy
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01R27/08
- IPC: G01R27/08 ; G01R31/308

Abstract:
A method may include illuminating a first area of a semiconductor utilizing a light source. The method may also include measuring at least one characteristic of electrical energy transmission utilizing a probe for placing at least one of at or near the illuminated first area of the semiconductor. The method may further include varying the measured at least one characteristic of the electrical energy transmission generated by the light from the light source incident upon the semiconductor while maintaining an intensity of the light source. Further, the method may include determining a sheet resistance for the junction of the semiconductor utilizing the varied at least one characteristic of the electrical energy transmission.
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