Invention Grant
- Patent Title: Probe card having a structure for being prevented from deforming
- Patent Title (中): 具有防止变形的结构的探针卡
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Application No.: US12745303Application Date: 2008-11-05
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Publication No.: US08415964B2Publication Date: 2013-04-09
- Inventor: Toshihiro Yonezawa , Shinichiro Takase
- Applicant: Toshihiro Yonezawa , Shinichiro Takase
- Applicant Address: JP
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP
- Agency: Cantor Colburn LLP
- Priority: JP2007-310114 20071130
- International Application: PCT/JP2008/070110 WO 20081105
- International Announcement: WO2009/069439 WO 20090604
- Main IPC: G01R31/00
- IPC: G01R31/00

Abstract:
A probe card according to the present invention includes a support plate for supporting probes that contact an object to be inspected, a circuit board, a holding member for holding a lower surface of an outer peripheral portion of the support plate, and an abutting member disposed between the lower surface of the outer peripheral portion of the support plate and the holding member and protruding upward to abut to the lower surface of the outer peripheral portion of the support plate. Accordingly, horizontal expansion of the support plate itself is allowed, and at the time of inspecting electrical characteristics of the object to be inspected, even though the temperature of the support plate is increased and the support plate expands, the support plate can expand in a horizontal direction, thereby suppressing vertical deformation of the support plate.
Public/Granted literature
- US20100301887A1 PROBE CARD Public/Granted day:2010-12-02
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